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Thin layers growing system by evaporation (System 1)

evaporation system


  • System to grow thin layers of metallic nature by thermal evaporation.
  • Its function in the LBTS is to make electric contacts on thin, High and Low Tc

superconducting films, to study their electric properties.

Technical features

  • 3 independents evaporation sources.
  • Vacuum up to 10-7 mbar, obtained by a vacuum pump group.
  • Possibility to introduce a controlled atmosphere, as well in pressure as in composition.
  • Rotative sample holder.
  • Piezoelectric thickness detector.


  • Layer thickness of a few tens of nanometers with good resolution.

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Page last modified on September 03, 2013, at 06:20 PM.