• Global site
  • Actividades locais



InfrastructurePhoto-lithography system


Photo-lithography system

photolithography system

Used to produce micropatterns on thin films.

Main specifications:

  • Headway Research PWH 101 spinner
  • KarlSuss IN470 mercury-xenon lamp with mask aligner system (4 cm x 4cm illumination area)


Printer-friendly version - Contact webmaster - Website admin - Page admin
Page last modified on February 20, 2018, at 08:56 PM.